Document details
Full-gap tracking system for parallel-plate electrostatic microactuatores(Conference Paper)(Open Access)
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- aCampus de Azurém, ALGORITMI CENTER, Universidade do Minho, Guimarães, Portugal
- bInternational Iberian Nanotechnology Laboratory INL, Braga, Portugal
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Abstract
An approach aiming bidirectional full-gap tracking of parallel-plate electrostatic microactuators is presented here. The approach is based on an On-Off control law, manipulating the structure location by actuating or releasing the device if the actual location is greater or smaller than the reference desired position. The existing ripple is due to delays on the readout circuit and control circuitry. In order to minimize delays on the control part, a high sampling frequency, 5MHz, is used. Experimental results show the tracking of signals up to 100Hz and an extended travel range up to 88.9% of the full available gap (limited by the existing mechanical stoppers of the devices). © 2014 The Authors. Published by Elsevier Ltd.
Indexed keywords
| Engineering controlled terms: | ActuatorsControl systemsControl theoryElectrostatic actuatorsElectrostaticsField programmable gate arrays (FPGA)MEMSSurface dischargesTransducers |
|---|---|
| Engineering uncontrolled terms | Control circuitryDesired positionElectrostatic microactuatorsHigh sampling frequenciesOn-off controlParallel platesRead-out circuitTracking system |
| Engineering main heading: | Plates (structural components) |
Funding details
| Funding sponsor | Funding number | Acronym |
|---|---|---|
| Fundação para a Ciência e a Tecnologia See opportunities | Pest-OE/EEI/UI0319/2014 |
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This work has been supported by FCT – Fundação para a Ciência e Tecnologia within the Project Scope: Pest-OE/EEI/UI0319/2014.
- ISSN: 18777058
- Source Type: Conference Proceeding
- Original language: English
- DOI: 10.1016/j.proeng.2014.11.701
- Document Type: Conference Paper
- Volume Editors: Sberveglieri G.,Ferrari V.
- Sponsors:
- Publisher: Elsevier Ltd
Moreira, E.E.; Campus de Azurém, ALGORITMI CENTER, Universidade do Minho, Guimarães, Portugal;
© Copyright 2017 Elsevier B.V., All rights reserved.
Cited by 1 document
Esteves Moreira, E.
, Lima, V.
, Serra Alves, F.
(2016) Sensors and Actuators, A: Physical
(2016) Sensors and Actuators, A: Physical
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