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Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)Volume 2015-February, Issue February, 26 February 2015, Article number 7051139, Pages 1036-10392015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015; Estoril; Portugal; 18 January 2015 through 22 January 2015; Category numberCFP15MEM-ART; Code 112211

Bi-directional extended range parallel plate electrostatic actuator based on feedback linearization(Conference Paper)

  • Moreira, E.E.,
  • Alves, F.S.,
  • Dias, R.A.,
  • Costa, M.,
  • Fonseca, H.,
  • Cabral, J.,
  • Gaspar, J.,
  • Rocha, L.A.
  • aCMEMS, University of Minho, Guimarães, Portugal
  • bINL, International Iberian Nanotechnology Laboratory, Braga, Portugal

Abstract

In this paper, we present a bi-directional extended range parallel-plate electrostatic actuator using feedback linearization control. The actuator can have stable displacements up to 90% of the full-gap (limited by mechanical stoppers) on both directions, i.e., the device can move ±2μm within a ±2.25μm gap. The system has successfully tracked references until 1kHz (limited by the dynamics of the device) and it presents a capacitor tuning range of 17, using an actuation voltage from 0 to 10V. The results presented here are a clear advance in respect to the current state-of-the-art in terms of tracking capabilities, total stable displacement and tuning range. © 2015 IEEE.

Indexed keywords

Engineering controlled terms:ActuatorsElectrostaticsFeedback linearizationLinearizationMechanical actuatorsMechanicsMEMSTuning
Engineering uncontrolled termsActuation voltagesBi-directionalExtended rangeFeedback linearization controlParallel-plate electrostatic actuatorsState of the artTracking capabilityTuning ranges
Engineering main heading:Electrostatic actuators
  • ISSN: 10846999
  • CODEN: PMEME
  • Source Type: Conference Proceeding
  • Original language: English
  • DOI: 10.1109/MEMSYS.2015.7051139
  • Document Type: Conference Paper
  • Sponsors: IEEE Robotics and Automation Society
  • Publisher: Institute of Electrical and Electronics Engineers Inc.


© Copyright 2015 Elsevier B.V., All rights reserved.

Cited by 5 documents

Li, C. , Dean, R.N. , Flowers, G.T.
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Active vibration isolator based on micromachined electrostatic actuators
(2016) Micro and Nano Letters
Esteves Moreira, E. , Lima, V. , Serra Alves, F.
Full-gap tracking system for parallel plate electrostatic actuators using closed-loop control
(2016) Sensors and Actuators, A: Physical
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