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Review of Scientific InstrumentsVolume 74, Issue 1 II, January 2003, Pages 747-749

Energy spectra and dynamics of surface states on silicon investigated by the photoacoustic method(Conference Paper)

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  • aCenter for Multidisciplinary Studies, University of Belgrade, P.O. Box 33, 10030 Belgrade, Serbia
  • bInst. for Chem., Technol./Metallurgy, Belgrade, Serbia

Abstract

The characteristics of energy spectra and dynamics of surface energy states (SES) on silicon were investigated using the photoacoustic (PA) method. The measured PA spectra was used to study the silicon samples of various surface quality. The difference in the PA amplitude spectra of a silicon wafer and a mechanically roughened wafer resulted in the energy distribution and SES dynamics.

Indexed keywords

Engineering controlled terms:Electron energy levelsInterfacial energyLaser beam effectsLight absorptionLight reflectionOptical beam splittersPlasma wavesSilicon wafersSpectrum analysisSurface roughnessThermal diffusionThermoelasticity
Engineering uncontrolled termsModulation frequenciesSurface energy states (SES)
Engineering main heading:Photoacoustic effect
  • ISSN: 00346748
  • CODEN: RSINA
  • Source Type: Journal
  • Original language: English
  • DOI: 10.1063/1.1523132
  • Document Type: Conference Paper
  • Publisher: American Institute of Physics Inc.

  Todorović, D.M.; Center for Multidisciplinary Studies, University of Belgrade, P.O. Box 33, Serbia;
© Copyright 2019 Elsevier B.V., All rights reserved.

Cited by 11 documents

Maliński, M. , Chrobak, Ł.
Numerical analysis of absorption and transmission photoacoustic spectra of silicon samples with differently treated surfaces
(2011) Opto-Electronics Review
Maliński, M. , Chrobak, Ł.
Numerical analysis of the photoacoustic spectra of silicon samples with differently treated surfaces
(2010) Optics Communications
Chrobak, Ł. , Maliński, M. , Zakrzewski, J.
The photoacoustic spectroscopic investigations of the surface preparation of ZnSe crystals with the use of the optimization methods
(2010) Applied Surface Science
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