Skip to main content
Journal of OpticsVolume 12, Issue 7, 2010, Article number 075602

Effects of the pulse duration in laser modification of nano-sized WTi film on Si substrate(Article)

  Save all to author list
  • aVinča Institute of Nuclear Sciences, University of Belgrade, PO Box 522, 11001 Belgrade, Serbia
  • bJožef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia

Abstract

A study of morphological and composition changes of the WTi/Si system induced by nanosecond and picosecond laser pulses is presented. A 190nm thick WTi film was deposited on a silicon substrate of n-type (100). The pulsed laser systems used were: nanosecond TEA CO2 laser (emission, 10.6νm; pulse FWHM; pulse duration 120ns) and picosecond Nd:YAG laser (emission, 532nm; pulse FWHM; pulse duration 40ps). During experiments the used fluences (Φ) had similar values, Φ1 = 20Jcm-2 in case of the TEA CO2 laser and Φ2 = 16Jcm-2 for the Nd:YAG laser. The laser-induced morphological and composition modifications showed a dependence on pulse duration. Generally, the following morphological changes were observed: (i)ablation/exfoliation of the WTi thin film, (ii)appearance of hydrodynamic features such as resolidified material, and (iii)formation of nano-sized grains and globules. Overall morphological modifications were more pronounced after the picosecond laser action. The surface composition analysis showed a quite different distribution of sample components depending on the pulse duration. Formation of the silicon dioxide (SiO2) was recorded only in the case of irradiation of the WTi/Si system by picosecond laser pulses. © 2010 IOP Publishing Ltd.

Author keywords

mosaic structurenanosecond laserpicosecond lasersurface modificationWTi thin films

Indexed keywords

Engineering controlled terms:Binary alloysCarbon dioxideCarbon dioxide lasersLaser pulsesNeodymium lasersPicosecond lasersSilicaSilicon oxidesSubstratesSurface treatmentTeaThin filmsTitanium alloysYttrium aluminum garnet
Engineering uncontrolled termsComposition analysisDifferent distributionsMorphological changesMorphological modificationMosaic structureNanosecond lasersPicosecond Nd:YAG laserW-Ti thin films
Engineering main heading:Pulsed lasers
  • ISSN: 20408978
  • Source Type: Journal
  • Original language: English
  • DOI: 10.1088/2040-8978/12/7/075602
  • Document Type: Article
  • Publisher: Institute of Physics Publishing

  Petrović, S.; Vinča Institute of Nuclear Sciences, University of Belgrade, PO Box 522, Serbia;
© Copyright 2020 Elsevier B.V., All rights reserved.

Cited by 0 documents

{"topic":{"name":"Sintering; Thin Films; Tungsten","id":71808,"uri":"Topic/71808","prominencePercentile":36.218765,"prominencePercentileString":"36.219","overallScholarlyOutput":0},"dig":"602db566d88a73e84e661d3bb33279c80574cbba28ca24da26758270b63a4bde"}

SciVal Topic Prominence

Topic:
Prominence percentile: