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Physica ScriptaIssue T149, April 2012, Article number 014082

Surface modification of Ti-based nanocomposite multilayer structures by using laser beam irradiation(Article)

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  • aVINČA Institute of Nuclear Sciences, Belgrade University, PO Box 522, 11001 Belgrade, Serbia
  • bInstitute of Physics Belgrade, University of Belgrade, Pregrevica 118, 11080 Belgrade, Serbia
  • cJožef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia

Abstract

A study of the effects of laser irradiation on the morphology and structure of Al/Ti and Ni/Ti multilayers is reported in this paper. Multilayers of Al/Ti and Ni/Ti were deposited by dc ion sputtering on Si(100) substrates in a single vacuum run. Laser processing was done by a focused Er, Yb, Cr glass laser beam at a wavelength of 1540 nm, a pulse duration of 40 ns and fluence in the range 8.5-23.8 J cm -2. Surface changes can be summarized as follows: (i) the intensive removal of surface material with crater-like characteristics, (ii) the appearance of hydrodynamic features (such as resolidified droplets) and (iii) the sporadic appearance of cracking. Changes in the (Ni/Ti)/Si system included modification of the Si substrate with the formation of polygonal-mosaic structures and the appearance of hydrodynamic features in the form of nano-globules. The rate of ablation increased with energy density, whereas the rate of ablation for the (Ni/Ti)/Si system (∼11×10 3 μm 3 per pulse) was higher than that for the (Al/Ti)/Si system (∼7×10 3 μm 3 per pulse). © 2012 The Royal Swedish Academy of Sciences.

Indexed keywords

Engineering uncontrolled termsEnergy densityFluencesIon sputteringLaser beam irradiationLaser processMultilayer structuresPulse durationsSi (100) substrateSi substratesSurface changesSurface materials
Engineering controlled terms:AblationErbiumHydrodynamicsLaser beamsSiliconSputteringSubstratesYtterbiumPhotonics
Engineering main heading:Multilayers
  • ISSN: 00318949
  • CODEN: PHSTB
  • Source Type: Journal
  • Original language: English
  • DOI: 10.1088/0031-8949/2012/T149/014082
  • Document Type: Article

  Petrović, S.; VINČA Institute of Nuclear Sciences, Belgrade University, PO Box 522, Serbia;
© Copyright 2012 Elsevier B.V., All rights reserved.

Cited by 2 documents

Rahman, T.U. , Khan, R.A.A. , Qayyum, H.
Characterization of microcraters fabricated on the silicon surface by single and multi-pulse laser ablation at various laser intensities
(2021) Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Trklja, N. , Salatic, B. , Krstic, I.
Modification of aluminium-titanium and nickel-titanium thin layers by plasma flow action
(2018) 45th EPS Conference on Plasma Physics, EPS 2018
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