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Applied Surface ScienceVolume 360, 1 January 2016, Pages 559-565

Single- and dual-wavelength laser pulses induced modification in 10×(Al/Ti)/Si multilayer system(Article)

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  • aUniversity of Belgrade, Institute of Physics Belgrade, Pregrevica 118, Belgrade, 11080, Serbia
  • bUniversity of Belgrade, Institute of Nuclear Science-Vinča, POB 522, Belgrade, 11001, Serbia
  • cJožef Stefan Institute, Jamova 39, Ljubljana, 1000, Slovenia

Abstract

The surface morphology of the ablation craters created in the multilayer 10×(Al/Ti)/Si system by nanosecond laser pulses at single- and dual wavelength has been studied experimentally and numerically. A complex multilayer thin film including ten (Al/Ti) bilayers deposited by ion sputtering on Si(1 0 0) substrate to a total thickness of 260 nm were illuminated at different laser irradiance in the range 0.25-3.5 × 10 9 W cm -2 . Single pulse laser irradiation was done at normal incidence in air, with the single wavelength, either at 532 nm or 1064 nm or with both laser light simultaneously in the ratio of 1:10 for energy per pulse between second harmonic and 1064 nm. Most of the absorbed laser energy was rapidly transformed into heat, producing intensive modifications of composition and morphology on the sample surface. The results show an increase in surface roughness, formation of specific nanostructures, appearance of hydrodynamic features and ablation of surface material with crater formation. Applying a small fraction (10%) of the second harmonic in dual-wavelength pulses, a modification of the 10×(Al/Ti)/Si system by a single laser pulse was reflected in the formation of wider and/or deeper craters. Numerical calculations show that the main physical mechanism in ablation process is normal evaporation without phase explosion. The calculated and experimental results agree relatively well for the whole irradiance range, what makes the model applicable to complex Al/Ti multilayer systems. © 2015 Elsevier B.V. All rights reserved.

Author keywords

Crater formationDual-wavelength pulsesLaser ablationNanostructures

Indexed keywords

Engineering controlled terms:AblationFilm preparationFilm thicknessLaser pulsesMultilayersNanostructuresSurface roughness
Engineering uncontrolled termsCrater formationDual wavelengthDual wavelength laserMulti-layer thin filmNanosecond laser pulseNumerical calculationPhysical mechanismSingle-pulse laser
Engineering main heading:Laser ablation

Funding details

Funding sponsor Funding number Acronym
North American Interfraternal FoundationNIF
OI 171038,III 45016,171038,45016
European Cooperation in Science and TechnologyMP1208,MP1203COST
  • 1

    The research was sponsored by the Ministry of Education, Science and Technological Development of the Republic of Serbia through projects No. III 45016 and No. OI 171038. We also acknowledge the support from European Community, COST Action MP1203,\"Advanced X-ray spatial and temporal metrology\", and COST Action MP1208, \"Developing the Physics and the Scientific community forInertial Confinement Fusion at the time of NIF ignition\".

  • 2

    The research was sponsored by the Ministry of Education, Science and Technological Development of the Republic of Serbia through projects No. III 45016 and No. OI 171038. We also acknowledge the support from European Community, COST Action MP1203, \u2FFFAdvanced X-ray spatial and temporal metrology\u2FFF, and COST Action MP1208, \u2FFFDeveloping the Physics and the Scientific community for Inertial Confinement Fusion at the time of NIF ignition\u2FFF.

  • ISSN: 01694332
  • CODEN: ASUSE
  • Source Type: Journal
  • Original language: English
  • DOI: 10.1016/j.apsusc.2015.10.203
  • Document Type: Article
  • Publisher: Elsevier B.V.

  Petrović, S.; University of Belgrade, Institute of Nuclear Science-Vinča, POB 522, Belgrade, Serbia;
© Copyright 2019 Elsevier B.V., All rights reserved.

Cited by 4 documents

Gaković, B. , Kudryashov, S.I. , Danilov, P.A.
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(2021) Applied Optics
Trklja, N. , Salatic, B. , Krstic, I.
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Peruško, D. , Kovač, J. , Petrović, S.
Selective Al-Ti reactivity in laser-processed Al/Ti multilayers
(2017) Materials and Manufacturing Processes
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