Full-self-powered humidity sensor based on electrochemical aluminum–water reaction(Article)(Open Access)
- aDepartment of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, Belgrade, 11000, Serbia
- bFaculty of Physical Chemistry, University of Belgrade, Studentski Trg 12-16, Belgrade, 11158, Serbia
- cCeFEMA, Instituto Superior Téchnico, Universidade de Lisboa, Lisbon, 1049-001, Portugal
Abstract
A detailed examination of the principle of operation behind the functioning of the full-self-powered humidity sensor is presented. The sensor has been realized as a structure consisting of an interdigitated capacitor with aluminum thin-film digits. In this work, the details of its fabrication and activation are described in detail. The performed XRD, FTIR, SEM, AFM, and EIS analyses, as well as noise measurements, revealed that the dominant process of electricity generation is the electrochemical reaction between the sensor’s aluminum electrodes and the water from humid air in the presence of oxygen, which was the main goal of this work. The response of the sensor to human breath is also presented as a demonstration of its possible practical application. © 2021 by the authors. Licensee MDPI, Basel, Switzerland.
Indexed keywords
| Engineering controlled terms: | AluminumHumidity sensors |
|---|---|
| Engineering uncontrolled terms | Aluminum electrodesAluminum thin filmsDominant processElectricity generationElectrochemical reactionsInterdigitated capacitorsNoise measurementsWater reaction |
| Engineering main heading: | Aluminum metallography |
Funding details
| Funding sponsor | Funding number | Acronym |
|---|---|---|
| Ministarstvo Prosvete, Nauke i Tehnološkog Razvoja | 200168,451-03-9/2021-14/200026,451-03-9/2021-14/200168 | MPNTR |
| Fundação para a Ciência e a Tecnologia See opportunities by FCT | IST-ID/156-2018 | FCT |
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1
This research was funded by the Ministry of Education, Science and Technological Development of the Republic of Serbia (Grant No. 451-03-9/2021-14/200026). \u0160ljuki\u0107 was financially supported by the Ministry of Education, Science and Technological Development of the Republic of Serbia (contract no. 451-03-9/2021-14/200168) and Funda\u00E7\u00E3o para a Ci\u00EAncia e a Tecnologia (FCT, Portugal) (contract no. IST-ID/156-2018 (B. \u0160ljuki\u0107)). The APC was funded by the Ministry of Education, Science and Technological Development of the Republic of Serbia (Grant No. 451-03-9/2021-14/200026).
- ISSN: 14248220
- Source Type: Journal
- Original language: English
- DOI: 10.3390/s21103486
- PubMed ID: 34067738
- Document Type: Article
- Publisher: MDPI AG
Bošković, M.V.; Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, Belgrade, Serbia;
Sarajlić, M.; Department of Microelectronic Technologies, Institute of Chemistry, Technology, and Metallurgy, University of Belgrade, Njegoševa 12, Belgrade, Serbia;
© Copyright 2021 Elsevier B.V., All rights reserved.
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